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Beilstein J. Nanotechnol. 2014, 5, 77–82, doi:10.3762/bjnano.5.7
Figure 1: XAS at the Ti-L2,3 edge measured for TiO2 films with thicknesses of 0.75 nm, 1.5 nm, 2.25 nm and 3 ...
Figure 2: XAS at O-K edge measured for TiO2 films with thicknesses of 0.75 nm, 1.5 nm, 2.25 nm and 3 nm. The ...
Figure 3: XAS difference spectra. The contribution of SiO2 to the XAS at the O-K edge was subtracted from the...
Figure 4: Detailed view of feature C. The spectra were normalized in order to distinguish line-shape changes.
Beilstein J. Nanotechnol. 2013, 4, 732–742, doi:10.3762/bjnano.4.83
Figure 1: Thickness distributions of T-ALD at 200 °C (a) and PE-ALD films at 200 °C (b), 80 °C (c) and rt (d)...
Figure 2: Ellipsometry results showing thickness homogeneity (a), growth rate (b) and refractive index at 632...
Figure 3: XPS survey spectra (Mg Kα) of the PE-ALD layers deposited at 200 °C (red curve), 80 °C (blue) and r...
Figure 4: O1s (a) and Al2p (b) core level spectra (Mg Kα) of the PE-ALD layers deposited at 200 °C (red curve...
Figure 5: C1s core level spectra (Mg Kα) of the PE-ALD layers deposited at 200 °C (red curve), 80 °C (blue) a...
Figure 6: Al2p core level spectra (Mg Kα) of the PE-ALD layers deposited at 200 °C (red curve), 80 °C (blue) ...
Figure 7: O1s core level spectra (Mg Kα) of the PE-ALD samples prepared at rt (a) and 80 °C (b) substrate tem...
Figure 8: O1s to Al2p elemental ratio versus substrate temperature of PE-ALD layers (blue squares); the data ...
Figure 9: O1s (a) and Al2p (b) core level spectra of the PE-ALD (red curves) and T-ALD layers (black) deposit...
Figure 10: Carbon content within PE-ALD layers (blue squares) versus substrate temperature determined by EDX (...
Figure 11: Infrared absorption index data for PE-ALD layers deposited at 200 °C (red curve), 80 °C (blue) and ...
Figure 12: Reactor and CCP source of the SENTECH ALD system: SI ALD LL.